About: http://webisa.webdatacommons.org/16041951

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The amorphous silicon is poly-crystallized by a laser, such as an excimer laser, or by solid-phase growth, thereby forming a poly-crystalline silicon layer 2 (FIG. 5(a)).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com