| http://www.w3.org/ns/prov#value | - The insulating film may be made of an inorganic material such as silicon oxide, silicon nitride, aluminum oxide, titanium oxide, calcium fluoride, or the like, or a polymeric material such as acrylic resin, epoxy resin, polyimide, tetrafluoroethylene, or the like, or a self-organizing molecular film such as of aminopropylethoxysilane.
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