About: http://webisa.webdatacommons.org/16054031

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This pattern image is compared to other pattern images retrieved from the same or other wafers, or is compared to an ideal image stored in the inspection system database.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk