| http://www.w3.org/ns/prov#value | - It is to be acknowledged that some experimental work involving the formation of Group III-V metal nitrides, as conducted by researchers in the 1960s to 1970s, used lower temperatures of 900 to 1000??? C. and some more recent work in the 1990s has utilized growth temperatures in the vicinity of 1000??? C., but such work has employed different process conditions than the present invention, such as t
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