| http://www.w3.org/ns/prov#value | - to encompass all types of electromagnetic radiation, including ultraviolet radiation (e.g. with a wavelength of 365, 248, 193, 157 or 126 nm) and EUV (extreme ultra-violet radiation, e.g. having a wavelength in the range 5-20 nm), as well as particle beams, such as ion beams or electron beams. [0068] The invention is described below with reference to a coordinate system based on orthogonal X, Y an
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