| http://www.w3.org/ns/prov#value | - It is noted that the metal diaphragm 9 may be made of stainless steel, inconel, or other alloy steel and may be formed by multiple metal diaphragms.As shown in FIGS. 9 and 10, the holding adapter 10 is formed in an annular shape, is made of stainless steel and is inserted into the recessed portion 8a of the body 8 so as to press and fix the outer peripheral edge of the metal diaphragm 9 in an air
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