| http://www.w3.org/ns/prov#value | - A typical one of the former manufacturing method is the sputtering evaporation, and a typical one of the latter is the vacuum evaporation. [0218] A material of the conductive material for forming the target plate may be a noble metal such as palladium, platinum, gold, and ruthenium, or carbon, and these simple substrate materials are employed as an electrode material, thereby to enable a stable el
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