| http://www.w3.org/ns/prov#value | - (that is, a face to be analyzed) having a sufficient area, and subsequently the presence or absence of a specific component in the cut section of the thin film is detected or the distribution state of the specific component is measured, thereby performing analysis. [0053] The method used in the analysis is not particularly limited, and may be any method capable of qualitatively or quantitatively d
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