| http://www.w3.org/ns/prov#value | - that the electrodes extend next to each other in a sequence, providing alternating voltages of equal amplitude and of equally spaced phase to each of said electrodes, connecting said voltages in non-sequential order to the electrodes to introduce a dynamic and non-motoring pattern of electrostatic clamp forces for clamping the workpiece to the mounting member, the step of arranging including arran
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