About: http://webisa.webdatacommons.org/160845588

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At this time, there is a case where the surface of the first insulating layer 113 is also oxidized or nitrided and a silicon oxunitride film is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com