| http://www.w3.org/ns/prov#value | - Otherwise, it is also possible to use effectively as the starting material for formation of the first layer region (G) gaseous or gasifiable substances, including halides containing hydrogen atom as one of the constituents, e.g. hydrogen halide such as HF, HCl, HBr, HI, etc.; halo-substituted hydrogenated silicon such as SiH2 F2, SiH2 I2, SiH2 Cl2, SiHCl3, SiH2 Br2, SiHBr3, etc. ; hydrogenated ger
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