| http://www.w3.org/ns/prov#value | - the active region, etching the first insulating film and making the first insulating film thin in regions other than the region where the resistor exists with the resistor as a mask, to form a second insulating film on the resistor, forming contact holes reaching the top surface portions of both end portions of the resistor, on the second insulating film, and forming electrodes at the top surface
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