| http://www.w3.org/ns/prov#value | - It should be understood that the support material may have two or more of these qualities, such as the good monocrystalline and conductive qualities. [0033] In this document, the term ???atomic implantation??? covers all types of bombardment with atomic or ionic species suitable for causing the species to be introduced into a material so as to obtain a maximum concentration of the species in the m
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