| http://www.w3.org/ns/prov#value | - At this time, the processed wafer W can be transferred through either one of the two intermediate chambers 8A and 8B. When the processed wafer W is held in the intermediate chambers 8A and 8B, the lifter pins 40A to 40C are used, which belong to a group other than the group used for holding the unprocessed wafer W. As a consequence, the unprocessed wafer W is prevented, as far as possible, from be
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