About: http://webisa.webdatacommons.org/161898987

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to the present invention, through the irradiation of the particle beam such as electron beam or ion beam, or light, only the polymer film 6??? can be subjected to resistance lowering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com