About: http://webisa.webdatacommons.org/161987545

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 3, the reference pieces are provided integrally with the stage or wafer/chuck system 301 or other sample holder or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com