About: http://webisa.webdatacommons.org/16200824

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The Ta-containing material may be deposited on the substrate in any suitable manner, for example, with deposition processes such as CVD and ALD sometimes being preferred.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es