PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • surfaces of the substrate must be metallized in a very precise and controlled manner to achieve a uniform depth (e.g. using such techniques as sputtering or vapor deposition), which is time consuming and equipment intensive.
http://www.w3.org/ns/prov#wasQuotedFrom
  • patents.com