About: http://webisa.webdatacommons.org/162042867

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As used herein, the term ???substrate??? refers to any generally planar supporting structure including, but not limited to, semiconductor wafers, bulk semiconductor substrates, single dice, or other semiconductor components.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com