About: http://webisa.webdatacommons.org/16220263

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deep trench isolation structures 320 comprise deep trenches that are filled with silicon oxide or tetraethyloxysilane (TEOS) or polysilicon or other similar material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com