About: http://webisa.webdatacommons.org/162531883

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Yet another embodiment of the present invention is a method for forming a buried a word line wherein the word line is formed over a deep trench and adjacent to a gate layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com