| http://www.w3.org/ns/prov#value | - A process as claimed in claim 4, wherein the carrier gas used in the immobilization step d) is saturated with Si(OR)4, SiHx (OR)4-x and/or SiXx (OR)4-x, wherein X=1 or 2, R is an alkyl group or an aryl group and X is a halide or an alkyl group.
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