About: http://webisa.webdatacommons.org/162825808

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A post-exposure bake (PEB) may be carried out to foster reactions such as decomposition for the speedy process of film loss (i.e., change in the film thickness).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com