About: http://webisa.webdatacommons.org/162880141

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A mask 320 (which may be composed of polymers, plastics, resins, silicon, metals, inorganic glasses, or other suitable materials that will be readily apparent to those of skill in the art) is superimposed on substrate 310.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com