About: http://webisa.webdatacommons.org/162945974

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A first conductive layer, which is typically a metal (M1) layer, 11 is deposited by ALD. Typically, M1 layer 11 is comprised of a metal or metal nitride, including Ta, TaxN, Ti, TiN or Al, which is used for constructing MIM capacitors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de