About: http://webisa.webdatacommons.org/163442093

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, one of the significant advantages of the present invention is that overlay layer 20 (and its associated metallization patterns) may be removed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com