About: http://webisa.webdatacommons.org/163469457

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one aspect of the illustrated embodiment, the recesses 112 can be formed in the substrate 110 a by etching, coining, stamping, or other suitable processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com