About: http://webisa.webdatacommons.org/163498479

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An embodiment of the present invention is a technique to provide mechanical support for ultra-thin wafers or dice to facilitate their handling and processing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com