About: http://webisa.webdatacommons.org/163783304

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a flow chart showing the steps required to configure a typical horizontal flow, single-wafer reactor to process a wafer of a specific diameter.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com