About: http://webisa.webdatacommons.org/163807074

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a graph which illustrates the phases of a three-phase square wave clamping voltage suitable for use in the wafer clamping apparatus of FIG. 8;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com