About: http://webisa.webdatacommons.org/163830760

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS is an emerging technology which uses the tools and techniques that were developed for the Integrated Circuit industry to build microscopic machines.
http://www.w3.org/ns/prov#wasQuotedFrom	amser.org