About: http://webisa.webdatacommons.org/163931485

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its
http://www.w3.org/ns/prov#wasQuotedFrom	mems-exchange.org