About: http://webisa.webdatacommons.org/164029820

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Likewise in the processing sequence about to be described, conventional steps for preparing the substrate, e.g. cleaning, CMOS tub formation, field oxide growth, etc., are within the skill of the art and need not be described in detail.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com