About: http://webisa.webdatacommons.org/164069173

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a plan view showing a part of the detection marks 5 and the electrodes 7 deposited upon the silicon wafer 6 by use of the mask shown in FIG. 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com