About: http://webisa.webdatacommons.org/164165915

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Microelectronic and electrooptic devices are fabricated by numerous sequential processing steps which include at least one step of depositing a thin metal or dielectric films onto substrates such as silicon, gallium arsenide, and glass.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr