About: http://webisa.webdatacommons.org/164198129

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 20 is a graph showing the refractive index of a silica layer at various positions across the surface of a wafer formed by methods of this invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com