About: http://webisa.webdatacommons.org/164597359

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Description will be given mainly on computation steps for calculating the film thicknesses of the silicon oxide film 3 and the silicon nitride film 4 which are disposed on the SOI substrate 10.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com