| http://www.w3.org/ns/prov#value | - By the heat treatment, the impurity elements are activated, and simultaneously the element (e.g., a metal element such as nickel) which is used as a catalyst for crystallizing the island-shaped semiconductor films 873 and 874 are gettered in the impurity regions 809 a, 809 b, and 813 a to 813 c including a high concentration impurity (such as phosphorus), and a nickel concentration mainly in a por
|
