| http://www.w3.org/ns/prov#value | - A semiconductor layer includes a region containing an impurity element which has a concentration of 1???1019/cm3 to 1???1021/cm3 and belongs to group 15 of the periodic table and an impurity element which has a concentration of 1.5???1019/cm3 to 3???1021/cm3 and belongs to group 13 of the periodic table, and the region is a region to which a catalytic element left in the semiconductor film (partic
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