About: http://webisa.webdatacommons.org/165563352

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since both the resist which is used as a mask pattern and the resin are an organic film, it is difficult to have the selection ratio thereof to be greater than 10.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com