About: http://webisa.webdatacommons.org/165599724

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Similar problems can occur in other applications, such as plasma or reactive ion etching etching, plasma chemical vapor deposition, physical vapor deposition, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com