| http://www.w3.org/ns/prov#value | - As described above, the present invention permits a selection from the following three approaches: (1) Photoelectrons emitted from a sample surface irradiated with an electromagnetic wave such as ultraviolet ray are detected to generate an electron image of the sample surface; (2) Secondary electrons emitted from a sample surface irradiated with an electron beam are detected to generate an electro
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