About: http://webisa.webdatacommons.org/165725734

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since the measuring signal is an averaged signal taken from a relatively large substrate surface area, this signal is less sensitive to local surface deformations.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com