About: http://webisa.webdatacommons.org/165810418

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A gate electrode 661 is formed from a material such as Ta, Cr, Mo, and Al on a substrate 660.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com