PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Accordingly, there is a need for a sputter target having a design which improves material utilization of the sputtering plate.
http://www.w3.org/ns/prov#wasQuotedFrom
  • freshpatents.com