About: http://webisa.webdatacommons.org/165913000

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, it can be said that the present invention is a method which is advantageous for the synthesis of a remarkably thin film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com