About: http://webisa.webdatacommons.org/165960107

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, defects such as pin holes can be prevented even when the insulating film is formed to be thin, thereby microfabrication and high performance of semiconductor elements such as transistors can be realized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com