About: http://webisa.webdatacommons.org/166080779

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A hard mask, for purposes of this disclosure, is a layer which can be etched selective to the underlying dielectric layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com