About: http://webisa.webdatacommons.org/166145424

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sheet resistance of such structures as measured across the planes is typically low, <0.1 ohm/sq, making the resistance of the ELG too low for accurate measurements of resistance changes during lapping.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com