About: http://webisa.webdatacommons.org/166358967

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The inventive stamper of the present invention advantageously has a lubricant coating that has a thickness less than the smallest dimensioned feature on the imprinting surface, e.g. less than about 100 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com